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MEMS: micro electro-mechanical systems. • Silicon integrated circuit industry is able to produce devices in volume with very high yield at low cost. • Silicon has MEMS: Microelectromechanical Systems. What are MEMS? ? Micro-electro-mechanical systems. ? miniaturized mechanical and electro-mechanical elements. FIGURE MEMS 10 NINTENDO'S ANNUAL REVENUE FROM 1991 TO 2008 (TOP LEFT) FIGURE MEMS 11 SENSORS TRENDS FOR HANDSETS .Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many The term MEMS generally refers to the micro-scale 'components' or micro-scale 'devices' within a system. Not the entire system itself. In this sense, the name Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of reliability and failure mechanisms of silicon surface-micromachined MEMS. The root causes of failure for operating and non-operating MEMS are discussed. It also describes the range of MEMS sensors and actuators, the University of Stanford, stanford.edu/group/SML/ee321/ho/MEMS-01- intro.pdf. 9. Microelectromechanical systems (MEMS) refer to a collection of microseconds and actuators that can sense its environment and have the ability to react to Over the last decade Micro-Electro-Mechanical Systems (MEMS) have evoked great interest in the scientific and engineering communities. They are formed by